Presentation Outline:Model Parameter Extraction
Philosophy
- Separate process-dependent fitting parameters (“unknown”) from process-variable physical parameters (“known” or estimated).
- Extract fitting parameters around the average values of physical parameters at the “extreme” conditions.
- Fix fitting parameters with physical parameters varied for statistical analysis of process fluctuations.
- Sequence of extraction: un-extracted parameters should have no influence; once extracted, its value should be fixed in subsequent extraction.
Model parameters
- 5 Input: Ldrawn, W, Vgs, Vds, Vbs.
- 10 Physical: tox, xj; DCD, Nss, Nsd, S, vsat; Nsub, Np, Rp.
- 23 Fitting: s; h0, fm, l, a, b, k0, k1, d0, d1, j0, j1; m1, m2, m3; z; r, u; x; Voff; ?v0, We0, Is0.
One-iteration, 11-step extraction — “de-embed”