BSIM Model Parameter Extraction
Measurement data and BSIM models
- There are altogether 5?10 sets of measurement data (50 plots), each one contains 51?4 measurement points.
- Two BSIM3v3 models are extracted using BSIMPro (with only one fixed input tox = 59 Å).
Best case
- All (200 sets) measured I-V data are used in parameter extraction.
- The modeled I-V curves are generated by BSIMPro (except for the Ids - Vgs @ Vds = 1 V, which is run by Hspice).
Worst case
- Only the I-V data at three Ldrawn = 10, 0.5, and 0.2 ?m are used.
- For each Ldrawn, the following six I-V sweeps are needed: Ids - Vgs @ Vds = 0.1 and 2.5 V, Vbs = 0 and -2.7 V; Ids - Vds @ Vbs = 0, Vgs = 1 and 2.5 V. (A total of 18 full I-V sweeps are needed.)
- The modeled I-V curves are generated by Hspice (level = 49) using the BSIMPro-extracted model parameters.