PPT Slide

Short Channel Threshold Voltage Model

The Neff model is applied to the short channel Vth model [K.Y. Lim etc., MSM’99, pp. 423-426] for RSCE. The Vth is:

,

,

,

,

Npile, a, b, l, i, and j are process-dependent fitting parameters in the Vth model.

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