The ULSI Era: Technology Scaling

• Power supply
  • Switching power (CVdd2f)
  • High-field effect (non-scaling Vdd/Vth)
    • Hot carrier (reliability)
    • Lower mobility (performance)

• Threshold voltage
  • Subthreshold leakage
  • Noise immunity

• Gate oxide
  • Tunneling leakage current
    • Chip standby power
  • Short-channel effect (non-scaling tox/L)

• Speed/power tradeoff
  • Vdd/Vth tradeoff
  • Ion/Ioff tradeoff

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