The ULSI Era: Technology Scaling
- Power supply
- Switching power (CVdd2f)
- High-field effect (non-scaling Vdd/Vth)
- Hot carrier (reliability)
- Lower mobility (performance)
- Threshold voltage
- Subthreshold leakage
- Noise immunity
- Gate oxide
- Tunneling leakage current
- Short-channel effect (non-scaling tox/L)
- Speed/power tradeoff
- Vdd/Vth tradeoff
- Ion/Ioff tradeoff