Definition of Predictability and Accuracy
Metrology analogy ? Can we measure linewidths?
- The answer varies whether you mean 1-µm or 0.1-µm linewidth.
Physics analogy ? Uncertainty principle
- The precision of a target to be predicted by TCAD depends on many (not one) variables. “Absolute accuracy,” in general, does not make sense.
Mathematics analogy ? Limit
- No matter how accurate the TCAD result can match the measured data, we can always find a better model as we gain deeper understanding of the process/device physics.
Philosophical viewpoint
- Breaking our own physical limits in approaching (instead of reaching) the ultimate truth through scientific and technological advancement.
An unambiguous definition of predictability must be
associated with the required accuracy.