Problems with TCAD Calibration
What are the problems?
- A formidable task ? emulating a very complex phenomenon of a complete processing and characterization process with physics-based models.
- Simply too many variables to be adjusted, especially for a “full-loop” calibration.
- Physical models are not well understood, or even not implemented.
- Measured data bound to have experimental errors, some of which cannot be controlled or estimated.
- For a new technology which is being developed and is changing, TCAD calibration will be essentially a dynamic process.
Where do the problems come from?
- The way we develop and use the TCAD (aside from the intrinsic difficulties).
- TCAD vendors ? provide “tools,” not “solutions.”
- TCAD users ? need to “get the job done, and fast,” rather than “tweaking coefficients for all days.”
How to solve the problems?
- Identify the specific objectives and make the best use of available resources to achieve the goals.